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These curves are very close to each other. 20%. One possible reason for the difference between the first round and the rest is that the stress in the bond may change when the pressure is initially applied. Following this redistribution, the sensor output appears to be repeatable. Temperature Coefficient When the temperature of the sensor varies, the thermal expansion of its parts (ferrule, ring and fiber) will introduce an additional change in the length of the airgap, over and above the pressure-induced change.

53. Diaphragm based fiber optic pressure sensor. 54. 8mm in diameter. 56, the sensor fabrication system includes three subsystems, the carbon dioxide (CO2) laser heating subsystem, the white light fiber optic interferometric airgap monitoring subsystem, and the step motor controlled rotary holder subsystem.

Then these small segments are polished to reduce the thickness to about 200 microns. Diluted hydrofluoric acid (HF) is used to further thin the ring down to 30-50 microns, controlling the thickness through the etching rate. Ring thickness is monitored throughout the process. Thickness Measurement Ring thickness measurements are critical in sensor preparation. Thinner rings are preferred to reduce the temperature coefficient. However, if the ring is too thin, it will be difficult to handle and the surface quality of the ring will deteriorate, resulting in poor bonding with many voids.

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