Design, Modeling and Control of Nanopositioning Systems by Andrew J. Fleming, Kam K. Leang

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By Andrew J. Fleming, Kam K. Leang

Covering the total layout cycle of nanopositioning platforms, this can be the 1st finished textual content at the subject. The ebook first introduces recommendations linked to nanopositioning levels and descriptions their program in such projects as scanning probe microscopy, nanofabrication, facts garage, mobilephone surgical procedure and precision optics. Piezoelectric transducers, hired ubiquitously in nanopositioning purposes are then mentioned intimately together with useful issues and constraints on transducer reaction. The reader is then given an outline of the kinds of nanopositioner sooner than the textual content turns to the in-depth insurance of mechanical layout together with flexures, fabrics, production suggestions, and electronics. This approach is illustrated by way of the instance of a high-speed serial-kinematic nanopositioner. place sensors are then catalogued and defined and the textual content then makes a speciality of control.

Several varieties of keep an eye on are handled: shunt keep watch over, suggestions regulate, strength suggestions keep watch over and feedforward keep watch over (including an appreciation of iterative studying control). functionality concerns are given significance as are difficulties proscribing that functionality equivalent to hysteresis and noise which come up within the remedy of keep an eye on and are then given chapter-length cognizance of their personal correct. The reader additionally learns approximately fee capabilities and different matters interested by command shaping, cost drives and electric concerns. All thoughts are validated experimentally together with by way of direct program to atomic strength microscope imaging.

Design, Modeling and keep watch over of Nanopositioning platforms could be of curiosity to researchers in mechatronics in general and up to speed utilized to atomic strength microscopy and different nanopositioning purposes. Microscope builders and mechanical designers of nanopositioning units will locate the textual content crucial reading.

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5 . 05 dB 0 -20 -40 -60 Measured piezoactuator response Linear model -80 10 0 10 1 10 2 10 3 Phase of Gv(s) (degrees) Frequency (Hz) 0 -100 -200 -300 -400 0 10 Measured piezosactuator response Linear model 10 1 10 2 10 3 Frequency (Hz) Fig. 19 The frequency response of a piezoactuator for modeling the vibrational dynamics. These plots show the measured frequency response (solid line), the magnitude and phase versus frequency, of the piezoactuator over ±2-µm displacement range. 8) where x(t) is the actuator’s displacement, x0 is the nominal fast displacement to the applied voltage, γ is the creep rate, and t0 is the settling time of the high-frequency dynamics (Rifai and Youcef-Toumi 2002).

Because of the random domain orientation, the material produces no net effect when mechanically stressed or when voltage is applied. However, through a process called poling, the material can be made to exhibit considerable piezoelectric effect. 3 Manufacturing Piezoelectric Ceramics 23 + - = domains with similarly oriented dipoles + b V b b - a Before poling a During poling a After poling (b’ > b; a’ < a) Fig. 4 The poling process Basically, the poling processes forces the dipoles in the material to align in a favorable direction as shown in Fig.

These devices are used in the following chapters as demonstration apparatus. 1 63 mm Piezoelectric Tube The 63 mm tube is pictured in Fig. 1b, c. To protect the tube and provide some immunity from environmental noise, the tube is housed in a removable aluminium shield. During assembly, the shield also serves as a jig to ensure the tube is both vertical and properly aligned while gluing. 5 g in mass) is glued to the tube tip. The capacitive displacement sensor is an ADE Tech 4810 Gaging Module and 2804 capacitive sensor with sensitivity 100 mV/µm over a range of ±100 µm and bandwidth of 10 kHz.

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